Michael Nagli, Ron Moisseev, Nathan Suleymanov, Eitan Kaminski, Yoav Hazan, Gil Gelbert, Ilya Goykhman, Amir Rosenthal
Abstract:
Silicon photonics is an emerging platform for acoustic sensing, offering exceptional miniaturization and sensitivity. While efforts have focused on silicon-basedÂ
resonators,Â
silicon nitride resonators can potentially achieve higher Q-factors, further enhancing sensitivity. In this work, a 30 ”mÂ
silicon nitride microring resonator was fabricated and coated with anÂ
elastomer to optimize acoustic sensitivity and signal fidelity. The resonator was characterized acoustically, and its capability for optoacousticÂ
tomography was demonstrated. An acoustic bandwidth of 120 MHz and a noise-equivalent pressure of âŒÂ 7 mPa/Hz
1/2Â were demonstrated. The spatially dependent impulse response agreed with theoretical predictions, and spurious acoustic signals, such asÂ
reverberations and surfaceÂ
acoustic waves, had a marginal impact. High image fidelity optoacousticÂ
tomography of a 20 ”m knot was achieved, confirming the detectorâs imaging capabilities. The results show that siliconÂ
nitride offers lowÂ
signal distortion and high-resolution optoacoustic imaging, proving its versatility for acoustic imaging applications.

Fig.
3D optoacoustic reconstruction of a surgical suture. (a) 2D maximum amplitude projection image of the suture. (b) Photograph of the suture showing the similarity between the reconstruction and the imaged object. (a) and (b) are the same scale. (c) 2D slice along the white dashed line shown in (a); shows the cross-section of the suture and demonstrates the lateral andÂ
axial resolutions.
Read more –Photoacoustics Volume 32, August 2023, 100527
Michael Nagli, Ron Moisseev, Nathan Suleymanov, Eitan Kaminski, Yoav Hazan, Gil Gelbert, Ilya Goykhman, Amir Rosenthal